| No. |
Items |
Standard Specification |
| 1 |
Size |
2" |
3" |
4" |
6" |
8" |
12" |
| 2 |
Diameter mm |
50.8±0.3 |
76.2±0.3 |
100±0.5 |
150±0.5 |
200±0.5 |
300±0.5 |
| 3 |
Conductivity |
P or N or un-doped |
| 4 |
Orientation |
(100), (110), (111) |
| 5 |
Thickness μm |
279, 381, 425, 525, 575, 625, 675, 725 or as required |
| 6 |
Resistivity Ω-cm |
≤0.005, 0.005-1, 1-10, 10-20, 20-100, 100-300 etc |
| 7 |
RRV max |
8%, 10%, 12% |
| 8 |
Primary Flat/Length mm |
As SEMI standard or as required |
| 9 |
Secondary Flat/Length mm |
As SEMI standard or as required |
| 10 |
TTV μm max |
10 |
10 |
10 |
10 |
10 |
10 |
| 11 |
Bow & Warp μm max |
30 |
30 |
30 |
30 |
30 |
30 |
| 12 |
Surface Finish |
As-cut, L/L, P/E, P/P etc |
| 13 |
Packing |
Foam box or cassette inside, carton box outside. |