| No. | Items | Standard Specification | ||||
| 1 | Size | 2" | 3" | 4" | 5" | 6" |
| 2 | Diameter mm | 50.8±0.3 | 76.2±0.3 | 100±0.5 | 125±0.5 | 150±0.5 |
| 3 | Conductivity | N/P | N/P | N/P | N/P | N/P |
| 4 | Orientation | (100), (110), (111) | ||||
| 5 | Thickness μm | 279, 381, 425, 525, 575, 625, 675, 725 or as required | ||||
| 6 | Resistivity Ω-cm | 1-3, 3-5, 40-60, 800-1000, 1000-1400 or as required | ||||
| 7 | RRV max | 8%, 10%, 12% | ||||
| 8 | TTV μm max | 10 | 10 | 10 | 10 | 10 |
| 9 | Bow/Warp μm max | 30 | 30 | 30 | 30 | 30 |
| 10 | Surface Finish | As-cut, L/L, P/E, P/P etc | ||||
| 11 | Packing | Foam box or cassette inside, carton box outside. | ||||